Scanmaster Elm 2.1 Serial Number
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Scanmaster Elm 2.1 Serial Number
A:
Serial number is a unique identifier of a software product and usually it includes the following values:
The manufacturer.
The title (or name, which is usually the same as the manufacturer).
The product number.
You can find the serial number on the box of the software.
Screenshot from
The invention relates generally to electrodes of the type known as sputtering target electrodes, and more particularly to a sputtering target plate of the type having a cooling system with a cooling liquid.
Sputtering target plates are used, for example, in the sputter-coating of semiconductor wafers. Semiconductor wafers are subjected to a high purity process and highly sensitive semiconductors require an extreme purity of the layers formed on the wafer. Layer uniformity is ensured by sputtering with an ultra-high purity sputtering gas.
If the sputtering target plate is made of steel, the sputter coating rate, and thus the throughput, can be reduced at high process pressures due to the contamination of the surface of the target by iron from the steel of the target plate. In the case of silicon wafers, the sputter coating rate is greatly reduced at high process pressures, as a result of silicon contamination.
Published German patent application DE-OS No. 29 25 316 describes the use of an aluminum target plate as a sputtering target plate. The sputtering target plate is cooled with a quenching liquid.
It is therefore the object of the present invention to provide a method of manufacturing sputtering target plates which result in higher sputtering coating rates.{
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